SAMPLE PREPARATION METHOD DEVICE AND SAMPLE OBSERVATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a sample preparation method and a sample preparation device, capable of performing sample observation in a short time in a transmission electron microscope, a scanning electron microscope or the like, and a sample observation device capable of observing the prepared sample in a short time. SOLUTION: An observation mark M3on the left side of a notched part 6b' and an observation mark M4on the right side of the notched part 6b' are formed by a focused ion beam IBas shown in Figure (d). As for the observation mark M3, a direction line m3" points to a defect part section A0so as to show that the section A0(sample processing part) of a defect part A exists in the right direction, viewing from the mark M3. On the other hand, as for the processing mark M4, a direction line m4" points to a defect part section A0so as to show that the section A0of the defect part A exists in the left direction (y-direction), viewing from the mark M4. COPYRIGHT: (C)2005,JPO&NCIPI