| 摘要 |
PROBLEM TO BE SOLVED: To provide a doping apparatus capable of suppressing the occurrence of particles produced when being used, enhancing yield, and reducing the number of times of downtime, and to provide a doping method. SOLUTION: The inner wall of a chamber in the doping system is made affinity to doping elements. In the Figure, the wall material of the chamber 101 is formed of CaVO<SB>3</SB>. COPYRIGHT: (C)2005,JPO&NCIPI
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