| 摘要 |
<p>Retaining and positioning device for optical element, in which element is installed in mounting ring via manipulator unit (4) which has linear adjustment element. Manipulator unit (4) has manipulator head, movable manipulator part and manipulator foot, where head is joined via solid link with movable manipulator part via actuator and solid link with manipulator foot, and linear adjustment element is coupled to manipulator foot and actuator. A retaining- and positioning-device for an optical element, in which the optical element is installed in a mounting ring which is mounted via at least one manipulator unit, where the manipulator unit (4) has a linear adjustment element. The manipulator unit (4) has a manipulator head, a movable manipulator part and a manipulator foot, where the manipulator head is joined via a solid link with the movable manipulator part via an actuator and at least one solid link with the manipulator foot and the linear adjustment element is coupled to the manipulator foot and the actuator. Independent claims are included (A) for a manipulator unit and (B) for a projection objective.</p> |
