| 发明名称 |
EQUIPMENT FOR FABRICATING SEMICONDUCTOR DEVICE TO REDUCE LOSS TIME IN TRANSFERRING WAFER BETWEEN APPARATUSES AND PREVENT WAFER FROM BEING CONTAMINATED IN TRANSFERRING WAFER BETWEEN APPARATUSES |
| 摘要 |
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| 申请公布号 |
KR100488194(B1) |
申请公布日期 |
2005.04.28 |
| 申请号 |
KR19980014230 |
申请日期 |
1998.04.21 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIL, JE SEONG |
| 分类号 |
H01L21/027;(IPC1-7):H01L21/027 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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