| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a high-speed pulse measurement apparatus for a semiconductor light-emitting device, which can perform efficient and accurate measurement of high-speed pulses of a semiconductor light-emitting device, and to provide an automatic high-speed pulse measurement device employing the same. <P>SOLUTION: The high-speed pulse measurement apparatus is provided, which performs high-speed pulse measurement for a semiconductor light-emitting device 1 to be tested which is constituted by accommodating a semiconductor light-emitting device chip in a package. The apparatus comprises: a high-speed pulse drive circuit 3 for effecting high-speed pulse driving to the device 1; a probe 7 with which a terminal pin 2 led out from the package of the device 1 is in electrical contact in a non-fit state; and a holding substrate 21 for the probe 7. The substrate 21 for the probe 7 is structured separately from the circuit 3 and is arranged such that an impedance matching circuit 9 for an output impedance of the circuit 3 and an input impedance at a loaded side including the device 1, is disposed on the substrate 21 of the probe 7. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
