发明名称 LINEAR MOTOR, STAGE APPARATUS, EXPOSURE SYSTEM, AND DEVICE MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To make it possible to prevent the occurrence of strain arising from heat generated when a linear motor is driven. SOLUTION: This linear motor is provided with a plurality of stator coils 3 wound annularly around a driving shaft and lined up in the direction of the driving shaft, stator yokes 5 provided inside the stator coils, support members 1 on which the stator yokes 5 are fixed, insulating members 2 provided between the stator coils 3 and the stator yokes 5 to electrically insulate the stator coils 3 and the stator yokes 5, and a mover that generates thrust in the direction of the driving shaft interacting with the stator coils 3. In this linear motor, the stator yokes 5 and the insulating members 2 are divided in the direction of the driving shaft and arrayed with a gap 6 at each divided position. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005117866(A) 申请公布日期 2005.04.28
申请号 JP20030352543 申请日期 2003.10.10
申请人 CANON INC 发明人 NISHIDA TOSHIHIKO;TANAKA HIDEO;MIYAJIMA GIICHI
分类号 G03F7/20;H01L21/027;H02K41/03;(IPC1-7):H02K41/03 主分类号 G03F7/20
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