| 摘要 |
PROBLEM TO BE SOLVED: To provide a pump module and a canister unit capable of being used both pressurization type leak inspection and depressurization type leak inspection. SOLUTION: The pump module is provided with a vane pump 31 driven by a DC motor 37. The vane pump 31 generates positive pressure by normally rotationally driving the vane pump 31 by the DC motor 37, and generates negative pressure by reversely rotationally driving the vane pump 31 by the DC motor 37. The vane pump 31 contains a cam ring 42, vanes 43, a rotor 44, and a side plate 46 positioned on the side faces of the cam ring 42, the vanes 43 and the rotor 44 and forming a pump chamber 45 together with the cam ring 42, the vanes 43 and the rotor 44. On the side plate 46, a suction port 51 and a discharge port 52 are provided so as to be communicatable with the pump chamber 45. The side plate 46 receives frictional resistance generated at least between the side plate 46 and the rotor 44, and rotates with respect to a casing 41. COPYRIGHT: (C)2005,JPO&NCIPI
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