| 摘要 |
A processing apparatus includes a vessel ( 1 ) which accommodates a target object (W), ultraviolet light-generating means ( 41 ) for outputting ultraviolet light (UV) toward an atmosphere (P) containing radicals in the vessel ( 1 ), ultraviolet light-receiving means ( 42 ) for receiving the ultraviolet light (UV) passing through the atmosphere (P), and analysis control means ( 43, 44 ) for obtaining a density of the radicals in the atmosphere (P) on the basis of an output signal from the ultraviolet light-receiving means ( 42 ), to control a process parameter. The density of the radicals can be held at a constant level, and process reproducibility can be improved.
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