| 摘要 |
<p>The invention relates to a turbomolecular vacuum pump with active magnetic bearings. The inventive pump comprises an enclosure (110) defining a primary vacuum chamber (116), a rotor (120), an electric motor (107), an axial magnetic bearing (103) and radial magnetic bearings (101, 102), an axial detector (106) and radial detectors (104, 105). According to the invention, remotely-located external electric circuits, which are associated with the electric motor (107) and with the axial (103) and radial (101, 102) magnetic bearings, essentially comprise electric power circuits (191). In addition, control circuits (194), which are used to control the axial (103) and radial (101, 102) magnetic bearings using signals transmitted by the axial (106) and radial (104, 105) detectors, are cast in resin and disposed inside the above-mentioned enclosure (110) in the primary vacuum chamber (116). The invention further comprises a sealed electrical connector (180) and an electric cable (183, 184) for connecting to the remotely-located external electric circuits (191, 192), said connector and cable each comprising fewer than 10 connecting or lead wires.</p> |
