| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum control system capable of constantly maintaining a degree of vacuum in a vacuum vessel and of effectively and accurately removing a vaporized component deaerated inside the vacuum vessel through a gas-permeable membrane so as to materialize stable operation, and a vacuum deaerator employing the vacuum control system. SOLUTION: While reducing pressure inside the vacuum vessel 1 by employing a vacuum pump 2 for exhaust operated by a direct-current type brushless motor 3, the pressure inside the vacuum vessel is monitored by a pressure sensor 5. On the basis of output signal obtained from the pressure measurement inside the vacuum vessel by the pressure sensor, voltage applied to the direct-current type brushless motor is controlled. By so doing, rotating force of the motor 3 is regulated to successively control displacement of the vacuum pump 1 so as to constantly maintain a degree of vacuum in the vacuum vessel. COPYRIGHT: (C)2005,JPO&NCIPI
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