| 摘要 |
Exemplary embodiments of the present invention provide shortening of the process time when a multi-layered type pattern is formed using a droplet discharging device. Exemplary embodiments provide a pattern forming method that includes: a drawing process whereby a liquid material, in which a pattern forming material composed of fine particles with a film coated dispersed in a disperse medium, is deposited onto a substrate via a droplet discharging device; and a calcination process whereby such liquid material deposited on the substrate is heated to a temperature above than the boiling point of its disperse medium, by repeating such drawing and calcination processes changing a pattern forming material in the drawing process, forming on a substrate a pattern made up of multi-layered film of multiple types of pattern forming materials, and a processing temperature used for the final heating process in the series of repeated calcination processes is above the decomposition temperatures of the film, while the processing temperature for the other calcination processes is above the boiling point of the disperse medium but below the decomposition temperature of the film.
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