发明名称 |
MODULAR DEVICE FOR COATING SURFACES, ESPECIALLY FOR THE MODULAR, DEDICATED COATING OF SURFACES |
摘要 |
The invention relates to a vacuum chamber for coating items (10) in which a physical vapor deposition method (PVD) is carried out. The aim of the invention is to create a vacuum chamber of the aforementioned kind which can be provided with modular cathodes. For this purpose, the vacuum chamber is provided with a plurality of receiving devices in which a plurality of cathodes each can be arranged. A first receiving device (30) for receiving one or more cathodes (40, 42, 44, 46) is provided substantially in the center of the vacuum chamber (20) and two additional receiving devices (32, 34) for receiving at least one cathode (48, 50, 52, 54) each are provided on the edges of the vacuum chamber (20) in a door-like manner. |
申请公布号 |
WO2005038077(A2) |
申请公布日期 |
2005.04.28 |
申请号 |
WO2004EP11669 |
申请日期 |
2004.10.15 |
申请人 |
PLATIT AG;PIVOT A.S.;CSELLE, TIBOR;JILEK, MOJMIR |
发明人 |
CSELLE, TIBOR;JILEK, MOJMIR |
分类号 |
C23C14/34;H01J37/34 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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