FLAW OBSERVATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a flaw observation technique capable of automatically determining an inclined observation direction to automatically take an inclined review image.

SOLUTION: In this flaw observation system for observing a flaw image in detail from many directions after the detection of a flaw, a position having to take an inclined image is automatically displayed on a screen using the data of ADC from the plane image (topdown image) of SEM and a flaw is designated and selected from the image displayed on the screen by a user and the angle and direction of inclination are determined at every selected flaw to take the inclined image (beam tilt image) to acquire the inclined image of the flaw.

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