摘要 |
An optical waveguide is formed on a substrate by first depositing an undercladding layer over the substrate. At least one core is formed over the undercladding layer. An uppercladding layer is then formed over the cores with a high-density plasma process. Deposition of the uppercladding layer may proceed by flowing an oxygen-containing gas, such as O<SUB>2</SUB>, a silicon-containing gas, such as SiH<SUB>4</SUB>, and a fluorine-containing gas, such as SiF<SUB>4</SUB>, into a process chamber to produce a gaseous mixture. A high-density plasma, i.e. having a density of at least 10<SUP>11 </SUP>ions/cm<SUP>3</SUP>, is generated from the gaseous mixture and then used to deposit a fluorinated silicate glass layer.
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