Two-step electrode for MEMs micromirrors

摘要

A "piano"-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these "piano" MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment the range of angular motion of a MEMs device's platform is increased by reducing the field strength, i.e. the force per unit area, that is sensed at the outer free ends of the platform. Ideally two-step electrodes are provided with a lower step positioned beneath the outer free end of the platform.