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发明名称
ACTUATOR COIL COOLING SYSTEM
摘要
申请公布号
SG110090(A1)
申请公布日期
2005.04.28
申请号
SG20040002069
申请日期
2004.04.16
申请人
ASML HOLDING N.V.
发明人
DANIEL N. GALBURT
分类号
H02K9/19;H02K9/22;H02K41/02;H02K41/03;(IPC1-7):H02K9/19
主分类号
H02K9/19
代理机构
代理人
主权项
地址
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