| 摘要 |
PROBLEM TO BE SOLVED: To provide a methods for manufacturing a thin-film device, an active matrix substrate, and an electrooptical device that form an organic functional element on a substrate and then transfers the element from the substrate to another substrate without damaging it, and the thin-film device, active matrix substrate, and electrooptical device obtained by those methods. SOLUTION: The methods have a stage S1 of forming a 1st separate film on a 1st base material, a stage S2 of forming the organic functional element on the 1st separate film, a stage S3 of uniting a 2nd base material with the organic functional element, and a stage S5 of separating the 1st base material from the organic functional element; and the contacting force between the 1st base material and 1st separate film is made partially difference in the stage S1 and a removing stage S4 of removing a part of high contacting force between the 1st base material and 1st separate film is provided before the stage S5. COPYRIGHT: (C)2005,JPO&NCIPI |
