发明名称 LIQUID DROPLET DISCHARGE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a liquid droplet discharge device of rectifying an air stream generated between a head and a liquid droplet receiving member by a simple constitution. SOLUTION: In the liquid droplet discharge device constituted so that the head 10 for discharging liquid droplets to a glass substrate 20 and a chuck 31 for holding the substrate 20 are arranged in opposed relationship and liquid droplets are discharged to the substrate 20 from the head 10 while relatively moving the head 10 and the substrate 20, the substrate 20 is held by the chuck 31 so that the upper surface of the chuck 31 and the upper surface of the substrate 20 are positioned within the same plane. Further, a first sheet member and a second sheet member protruded in the direction crossing the relative moving direction are provided to the head 10 and the chuck 31. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005114506(A) 申请公布日期 2005.04.28
申请号 JP20030348127 申请日期 2003.10.07
申请人 CANON INC 发明人 AOYANAGI TAKAAKI
分类号 B41J2/01;B05C5/00;G01N1/00;G01N35/10;G01N37/00;(IPC1-7):G01N35/10 主分类号 B41J2/01
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