| 摘要 |
PROBLEM TO BE SOLVED: To provide a lighting system which prevents a throughput decrease caused by an illuminance decrease and ensures high quality exposure by extending a variable power range and to provide an exposure apparatus that has the lighting system. SOLUTION: A lighting optical system which illuminates a face with light from a light source includes: a first optical system which has a movable group capable of moving along an optical axis, guides the light to the face to be illuminated, and can vary the illuminating area of a specific face; and a second optical system which can be inserted into/extracted from the optical path of the first optical system. When disposed in the optical path of the first optical system, the second optical system cooperates the first optical system so that while an illuminating distribution shape on the specific face is maintained, the illuminating area of the specific face is varied relative to the illuminating area of the specific face illuminated with only the first optical system. COPYRIGHT: (C)2005,JPO&NCIPI
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