| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems wherein chemical characteristics of Al materials, such as corrosion differ according to conformations of micro-compounds consisting of the same elements which affects product qualities, and to provide a method used for identification or mapping of micro compounds using EPMA, which utilizes the relative X-ray intensity ratio of a main element constituting a compound, has a risk to simultaneously measure other compounds existing under the target compound due to the high penetration power of the characteristic X-rays used in the method. SOLUTION: By utilizing reflected electrons conveying information from the polar surface of a sample, the energy of the reflected electrons is taken in to account by the Monte Carlo simulation method which has not been investigated, and the relationship between the atomic numbers and back surface scattering coefficients are revised to classify the reflection electrons by specific energy. A proportional relation between the atomic numbers and back scattering coefficients is found, thereby enabling conducting of a state analysis of the reflected electrons. COPYRIGHT: (C)2005,JPO&NCIPI
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