HUMIDITY SENSOR AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a humidity sensor capable of being miniaturized without increasing impedance. SOLUTION: An annular frame part 7, which surrounds the region of the surface 5a of an insulating substrate 5 having a humidity-sensitive film 13 formed thereto to prevent the outflow of a humidity-sensitive liquid, is provided on the surface 5a of the insulating substrate 5. A predetermined amount of the humidity-sensitive liquid is injected in the frame part 7 and the humidity-sensitive liquid injected in the frame part 7 is dried to form the humidity-sensitive film 13. COPYRIGHT: (C)2005,JPO&NCIPI