发明名称 MANUFACTURING DEVICE OF DISPLAY DEVICE, AND MANUFACTURING METHOD OF DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing device and a manufacturing method of a display device wherein damages to a display element can be reduced in manufacturing of a sealed body in order to maintain superior display performance over a long term. SOLUTION: In the manufacturing device of the display device, this has a housing part 701 to house a materials source S in order to form a buffer layer or a barrier layer, a substrate holder 702 to retain a substrate SUB equipped with an effective part 106 in a state that its main face is opposed to the housing part 701, and a heat shielding plate 703 arranged between the housing part 701 and the substrate SUB retained by the substrate holder 702. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005116253(A) 申请公布日期 2005.04.28
申请号 JP20030346956 申请日期 2003.10.06
申请人 TOSHIBA MATSUSHITA DISPLAY TECHNOLOGY CO LTD 发明人 SUMIDA SHIROU;SANO HIROSHI;YOSHIOKA TATSUO;HARUHARA KAZUYUKI;YAMAUCHI YUICHI
分类号 H05B33/10;C23C14/24;H01L51/50;H05B33/04;H05B33/14;(IPC1-7):H05B33/10 主分类号 H05B33/10
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