发明名称 |
MANUFACTURING DEVICE OF DISPLAY DEVICE, AND MANUFACTURING METHOD OF DISPLAY DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing device and a manufacturing method of a display device wherein damages to a display element can be reduced in manufacturing of a sealed body in order to maintain superior display performance over a long term. SOLUTION: In the manufacturing device of the display device, this has a housing part 701 to house a materials source S in order to form a buffer layer or a barrier layer, a substrate holder 702 to retain a substrate SUB equipped with an effective part 106 in a state that its main face is opposed to the housing part 701, and a heat shielding plate 703 arranged between the housing part 701 and the substrate SUB retained by the substrate holder 702. COPYRIGHT: (C)2005,JPO&NCIPI
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申请公布号 |
JP2005116253(A) |
申请公布日期 |
2005.04.28 |
申请号 |
JP20030346956 |
申请日期 |
2003.10.06 |
申请人 |
TOSHIBA MATSUSHITA DISPLAY TECHNOLOGY CO LTD |
发明人 |
SUMIDA SHIROU;SANO HIROSHI;YOSHIOKA TATSUO;HARUHARA KAZUYUKI;YAMAUCHI YUICHI |
分类号 |
H05B33/10;C23C14/24;H01L51/50;H05B33/04;H05B33/14;(IPC1-7):H05B33/10 |
主分类号 |
H05B33/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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