Light quantity distribution control element and optical apparatus using the same

摘要

A light quantity distribution control element includes a substrate of 20 mmx20 mmx3 mm made of a material that transmits light, such as optical glass or acryl, and a antireflective structure provided on a surface of the substrate. As the antireflective structure, a conical antireflective structure of a pitch of 0.15 mum (periodic structure having conical convexities) is formed. This corresponds to a antireflective structure having a pitch of a wavelength or less in the ultraviolet band (150 nm to 400 nm) at the time when ultraviolet light is used as incident light.