| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a treating method for fluorine compound-containing exhaust gas by which almost all fluorine in the fluorine compound-containing exhaust gas can be recovered in a recyclable state on an exhaust gas treating line and further waste water treatment is not necessary at all. <P>SOLUTION: Since water vapor V is mixed with the fluorine compound-containing exhaust gas G1 and obtained mixture is subjected to pyrolysis, treated gas G2 containing acidic gases GA such as hydrogen fluoride and a large quantity of water vapor V is produced after pyrolysis. When the treated gas G2 is quenched, water vapor in the gas G2 is condensed to water and a large quantity of acidic gases GA is brought into contact / reaction with water to produce acid A. Since thus produced acid A has very high concentration, recovered acid A can be reutilized as it is as valuables. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
