BIPOLAR ELECTROSTATIC CHUCK

摘要

PROBLEM TO BE SOLVED: To provide a bipolar electrostatic chuck exhibiting excellent uniformity in attraction force. SOLUTION: The bipolar electrostatic chuck 10 comprises a dielectric ceramic body 11, and a pair of electrodes 12a and 12b inducing an electrostatic force for attracting an article to the surface of the dielectric ceramic body 11 in the dielectric ceramic body 11 when a specified voltage is applied. Main inter-electrode distance L of the electrodes 12a and 12b is set between 1-3 times of the distance t between the surface of the dielectric ceramic body 11 and the electrodes 12a and 12b. COPYRIGHT: (C)2005,JPO&NCIPI