| 摘要 |
PROBLEM TO BE SOLVED: To provide a packing material which can prevent moisture absorption from occurring, and also, can prevent a dust generation by the vibration during transport from occurring as well in the packing material for the storage and carrying of a product substrate. SOLUTION: This packing material which houses the substrate is equipped with a dehumidifying agent through a material having a water vapor permeability of 10 g/24 hr or lower, and having dust preventing property and moisture permeability in the internal space of the packing material. COPYRIGHT: (C)2005,JPO&NCIPI |
