| 摘要 |
PROBLEM TO BE SOLVED: To overcome the problem that a working indicated value including a measuring error is presented when an inclination of a non-spherical working surface includes the error caused by disorder of an examination pattern at each point when working the non-spherical surface. SOLUTION: A table indicating how a distortion changes is used when working a shape that can be represented with a Zernike function. On the basis of the table, the shape of the non-spherical surface is optimized. COPYRIGHT: (C)2005,JPO&NCIPI
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