| 摘要 |
PROBLEM TO BE SOLVED: To stably join substrates together and to contribute to improvement of joining strength. SOLUTION: A 1st substrate 2 and a 2nd substrate are electrically joined together. A manufacturing method includes the stages of: forming a recessed part 10 in the 1st substrate 2; mounting a holding member 22 which has an opening 23 corresponding to the recessed part 10 on the 1st substrate 2; coating the recessed part 10 through the opening 23 with a joining material 4 containing conductive particles 4b of particle size smaller than the total of the depth of the recessed part 10 and the thickness of the holding member 22, and removing the holding member 22. COPYRIGHT: (C)2005,JPO&NCIPI
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