| 摘要 |
A mapping-measurement apparatus for applying mapping measurement to a predetermined area on a surface of a sample, comprising: a light illumination unit for illuminating the sample with light; a photodetector for detecting, through an aperture, reflection light or transmission light coming from the sample; and a detection-side scanning mirror provided in the optical path from the sample to the aperture. The aperture restricts light to be detected by the photodetector only to light coming from a given measurement portion only on the surface of the sample. The detection-side scanning mirror is structured such that the direction of a reflection plane thereof can be changed. The direction of the reflection plane of the detection-side scanning mirror is changed with respect to the incident direction of the reflection light or the transmission light coming from the sample to change the measurement portion on the surface of the sample where measurement is performed by the photodetector. |
