| 发明名称 |
PROCESSES FOR FABRICATING CONDUCTIVE PATTERNS USING NANOLITHOGRAPHY AS A PATTERNING TOOL |
| 摘要 |
Nanolithographic deposition of metallic nanostructures using coated tips for use in microelectronics, catalysis, and diagnostics. AFM tips can be coated with metallic precursors and the precursors patterned on substrates. The patterned precursors can be converted to the metallic state with application of heat. High resolution and excellent alignment can be achieved. |
| 申请公布号 |
CA2537023(A1) |
申请公布日期 |
2005.04.28 |
| 申请号 |
CA20042537023 |
申请日期 |
2004.08.26 |
| 申请人 |
NANOINK, INC. |
发明人 |
CROCKER, PERCY VANDORN, JR.;AMRO, NABIL A.;ELGHANIAN, ROBERT;DEMERS, LINETTE |
| 分类号 |
G03F7/00;B01J;B05D5/12;C23C18/08;C23C18/16;C23C18/28;C23C20/02;G01Q70/00;G03F7/16;H01L21/288;H01L21/44;H01L21/4763;H01L21/64;H01L21/768;H05K3/10;H05K3/12 |
主分类号 |
G03F7/00 |
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