发明名称 |
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor integrated circuit device enabling an improvement in the degree of integration and the simplification of a manufacturing process. <P>SOLUTION: The semiconductor integrated circuit device has first n-channel MOSFETs and first p-channel MOSFETs in which gate insulating films are formed in first film thicknesses and n-type impurities are doped to polysilicon layers constituting gate electrodes. The integrated-circuit device further has second n-channel MOSFETs which have the gate insulating films having second film thicknesses thinner than the first film thicknesses and in which n-type impurities are doped to the polysilicon layers constituting the gate electrodes, and second p-channel MOSFETs in which p-type impurities are doped to the polysilicon layers configuring the gate electrodes. The gate electrodes for the first n-channel MOSFETs and the first p-channel MOSFETs are formed integrally, and mutually connected circuits are formed. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
申请公布号 |
JP2005116654(A) |
申请公布日期 |
2005.04.28 |
申请号 |
JP20030346500 |
申请日期 |
2003.10.06 |
申请人 |
HITACHI LTD |
发明人 |
KAWAMATA TSUNEO;HASEGAWA MASATOSHI;TORIYAMA KEINOSUKE;HOKARI TOMOSHI |
分类号 |
G11C11/401;G11C11/408;G11C11/4097;H01L21/8238;H01L21/8242;H01L27/02;H01L27/092;H01L27/105;H01L27/108 |
主分类号 |
G11C11/401 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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