| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming apparatus which generates the scattering particulate groups of thin film forming components by a laser abrasion method, a sputtering method, an arc discharge method, etc., and causes the scattering particulate groups to adhere to a substrate and to constitute the apparatus in such a manner that the scattering particulate groups can be easily caught even if a filter for catching droplets is made inexpensive by designing the filter to an easily manufacturable shape and further that the redischarge of the once caught particulates is reliably prevented to avoid the contamination of thin films. SOLUTION: The poriform rotary filter plate which is provided with a large number of through-holes penetrating a disk to its both sides and is made rotatable at a high speed around the center of the disk as an axis of rotation is disposed between a target and the substrate. The filter plate is so arranged that only the particulates flying past the through-holes deposit on the substrate and that the particulates of a low flying speed which are to constitute the droplets are caught on the inner surfaces of the through-holes. The ratio of (the surface area of the total of the portions of the through-holes)/(the total surface area of the poriform rotary filter plate) are specified to≥80% and the diameter of the through-holes in the interior of the filter plate is preferably made greater than the diameter in the surface portions of the filter plate. COPYRIGHT: (C)2005,JPO&NCIPI
|
