| 摘要 |
FIELD: vacuum systems. ^ SUBSTANCE: invention relates to devices designed for providing first stage-vacuum in vacuum systems. Proposed pump has hollow housing, two coaxial parts of which are arranged, each, inside corresponding coil of electromagnet. In one of said parts intake valve is installed for axial displacement, and in other part of housing outlet valve is secured and hollow rod is arranged for axial displacement, being armature of electromagnet, with two open ends and with diaphragm hermetically secured with its central part on rod from side on intake valve, and by peripheral part, on housing. In part of housing accommodating outlet valve, two check valves can be additionally installed, one of which separates variable volume limited by said part of housing and diaphragm, and constant volume of outlet valve housing, and the other separates variable volume and atmosphere. ^ EFFECT: high reliability, easy to manufacture. ^ 6 cl, 4 dwg
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