| 摘要 |
An improved beam for use in ablating a surface to be processed. The improved beam front has a profile with a plurality of undulation and the plurality of undulations define a plurality of annular peaks and annular valleys. An intensity of each annular peak is about 10 percent greater than an intensity of each annular valley whereby the undulation of the improved beam facilitates formation of a substantially uniform feature in the surface to be processed. A method of utilizing an improved beam to form the desired feature in a surface to be processed is also disclosed. To reduce energy losses, a fourier transform is performed on the supplied laser beam. Before striking the surface, this beam passes through a focusing lens which performs a reverse fourier transform and retransforms the wave front substantially back to its originally wave form and intensity.
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