发明名称 |
Magnetic actuator under piezoelectric control |
摘要 |
A magnetic actuator for adjusting a force on a load is presented herein. The magnetic actuator comprises a first actuating part that includes a first magnetic element and a second magnetic element, a second actuating part that includes a third magnetic element and a piezoelectric element attached to the first and second magnetic elements to relatively displace the first and second magnetic elements. The first actuating part and said second actuating part are constructed and arranged to generate a magnetic force between both actuating parts along a first direction with a load being attached to one of the first and second actuating parts.
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申请公布号 |
US6885117(B2) |
申请公布日期 |
2005.04.26 |
申请号 |
US20030719664 |
申请日期 |
2003.11.24 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
DE WEERDT ROBRECHT EMIEL MARIA LEONIA;DAMS JOHANNES ADRIANUS ANTONIUS THEODORUS |
分类号 |
H01L41/08;G03F7/20;H01L21/027;H02K7/12;H02K41/035;(IPC1-7):H02K41/00 |
主分类号 |
H01L41/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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