发明名称 Conveying arm
摘要 A conveying arm of the invention includes a first pivotable shaft connected to a first arm which is also pivotably connected to a third arm having an intermediate pivotable portion. The third arm is also pivotably connected to a fifth arm which is also pivotably connected to a seventh arm which has a holding portion for an object to be conveyed. The conveying arm also includes a second pivotable shaft connected to a second arm which is also pivotably connected to a fourth arm having an intermediate pivotable portion. The fourth arm is also pivotably connected to a sixth arm which is also pivotably connected to the seventh arm. With respect to both the third and fourth arms, a line linking one-side end portion to an intermediate pivotable portion is substantially perpendicular to a line linking the other-side end portion to the intermediate pivotable portion.
申请公布号 US6884019(B2) 申请公布日期 2005.04.26
申请号 US20030418048 申请日期 2003.04.18
申请人 TOKYO ELECTRON LIMITED 发明人 SAEKI HIROAKI
分类号 B25J9/10;H01L21/677;H01L21/687;(IPC1-7):B66C23/00 主分类号 B25J9/10
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