发明名称 |
Method, apparatus, and computer program of searching for clustering faults in semiconductor device manufacturing |
摘要 |
A method of searching for clustering faults is employed for semiconductor device manufacturing, The method enters data on faults present in a search target, calculates a frequency distribution of the faults in unit cells divided from the search target, approximates the frequency distribution by overlaying at least two discrete distribution functions, and searches for clustering faults according to weights of the discrete distribution functions on the frequency distribution.
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申请公布号 |
US6885950(B2) |
申请公布日期 |
2005.04.26 |
申请号 |
US20010931916 |
申请日期 |
2001.08.20 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
MITSUTAKE KUNIHIRO;USHIKU YUKIHIRO |
分类号 |
G06F17/18;G06F17/30;H01L21/00;H01L21/02;H01L21/66;(IPC1-7):G01R31/00 |
主分类号 |
G06F17/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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