发明名称 |
LASER HAVING BAFFLED ENCLOSURES |
摘要 |
Disclosed is a laser useful in, e.g., photolithography or medical surgery. I n one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam ar e disclosed, as are photolithography methods utilizing a laser and method of this invention.
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申请公布号 |
CA2468451(C) |
申请公布日期 |
2005.04.26 |
申请号 |
CA19972468451 |
申请日期 |
1997.01.03 |
申请人 |
CYMER, INC. |
发明人 |
FOMENKOV, IGOR V.;LARSON, DONALD G.;DERUYTER, ANTHONY J.;PARTLO, WILLIAM N.;DAS, PALASH P.;WATSON, TOM A. |
分类号 |
H01S3/041;(IPC1-7):H01S3/041 |
主分类号 |
H01S3/041 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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