| 摘要 |
The invention concerns a method and an apparatus for automatically focusing an optical device onto a specific and predetermined region of a specimen. The apparatus compares signals corresponding to the vertical distance between a principal objective and a region of a specimen which is in focus to the vertical distance between the principal objective and a target region on the specimen. If the comparison of the distances indicates that they are not the same, the system automatically alters the distance between the specimen and the principal objective so that the target region is properly focused.
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