发明名称 A process for the production of high-purity semiconductor material
摘要 In a process for the production of high parity silicon semi-conductor material by single crystal growing, up to 1 atom per cent of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo and/or W is added to the silicon either in the form of gaseous compounds (e.g. chlorides) during the production of the silicon from a gaseous compound thereof, or in elemental form by adding to the melt.
申请公布号 GB1078216(A) 申请公布日期 1967.08.09
申请号 GB19650050231 申请日期 1965.11.25
申请人 SIEMENS-SCHUCKERTWERKE AKTIENGESELLSCHAFT 发明人
分类号 C01B33/02;C30B11/06;C30B13/10;C30B15/00;H01L21/00 主分类号 C01B33/02
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