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发明名称
Y-SCAN DEVOCE OF AN ION IMPLANTING APPARATUS
摘要
申请公布号
KR100484863(B1)
申请公布日期
2005.04.22
申请号
KR20030006779
申请日期
2003.02.04
申请人
发明人
分类号
H01L21/265;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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