| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a clean capsule capable of preventing the short circuit phenomenon of the clean air by controlling a clean air circulating passage in a clean space of the clean capsule with a simple constitution, and adjusting installation positions of an air supply opening and an exhaust opening even during the operation of a device installed in the clean space while keeping clean environment. <P>SOLUTION: This clean capsule comprises a shielding member 21b capable of changing a shielding area of the exhaust opening 8 formed on a partition 6 between the clean space 2 as a small space kept in a clean state and its side spatial part 3. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
