ELECTRON EMISSION ELECTRODE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an electron emission electrode which has high electron emission efficiency and is easy to be manufactured.

SOLUTION: A substrate 11 is formed by fixing diamond particles of a particle size of 5-30μm on a base body 12. A petal-like carbon flake aggregate 14 in which carbon flakes are connected in a random direction with respect to the substrate is formed by using gas containing carbon and hydrogen gas by a DC plasma CVD by keeping the temperature of the substrate 11 at 950-1,200°C. Each carbon flake is constituted of a graphene sheet of a height of 1 nm-500 nm and the interval between each flake at an outer side aperture is 3μm or less and the size of the petal-like carbon flake aggregate 14 is 5μm-30μm, and the interval between adjoining carbon flake aggregates is 1 D-10 D when the diameter of the flake aggregate is made D.

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