LITHOGRAPHIC EQUIPMENT AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a lithographic equipment along with a device manufacturing method which is equipped with an electromagnetic actuator for accurately positioning an object. SOLUTION: An actuator comprises a coil assembly that comprises two coils surrounding a magnet assembly, comprising the magnet which is magnetized in the direction of a generated power. The generated power is almost constant across the operation range of the actuator. The actuator may be equipped with a cooling body that surrounds the coil assembly. COPYRIGHT: (C)2005,JPO&NCIPI