| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck at normal temperature with respect to resistance to a corrosive gas improved, and to provide an electrostatic chuck with warpage reduced. SOLUTION: An aerosol with particles of a brittle material dispersed therein is sprayed from a nozzle toward a conductive substrate. The particles are crushed and deformed, under the impact of collision with the surface of the conductive substrate and joint to the surface. An insulator layer is thus formed of the brittle material on the conductive substrate for the formation of an electrostatic chuck, and its surface serves as an adsorbing surface. The insulator layer is so designed as to comprise at least two insulator layers and to have a withstand voltage of≥10 V/μm. COPYRIGHT: (C)2005,JPO&NCIPI |
