| 摘要 |
PROBLEM TO BE SOLVED: To accurately evaluate the operating ratio of a semiconductor production line, and to design a semiconductor production line of high operating ratio. SOLUTION: In the operation rate evaluating system for determining the operation rate of a semiconductor production line supposed to be series connected with a device group having one or a plurality of devices in time series, depending on the processing, probability of operation and probability of stoppage are applied to all combinations k, where at least the line production capacity is not zero out of respective combinations of operation and stoppage of respective devices constituting the line; emergence probability Xi (i=1-k) of combination is calculated by determining the product of probability of all devices (S4); product of the emergence probability Xi of a combination and the production capacity Yi of that combination is determined as a probability conversion production capacity; and a value Q=Σ(i=1-k)Xi×Yi/F is calculated as a line operation rate (S6), by dividing the summation of probability conversion production capacity of respective combinations by the production capacity F, at 100% operation. COPYRIGHT: (C)2005,JPO&NCIPI
|
