METHOD OF MANUFACTURING OPTICAL DISK

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an optical disk which is excellent on electric characteristics with satisfactory productivity by improving pinhole yield. SOLUTION: The method includes: a first process in which a substrate 1 is arranged by being opposed to a target for a first dielectric layer and a first dielectric layer 2 is formed on the substrate 1 by sputtering; a second process in which the substrate 1 on which the first dielectric layer 2 is formed is arranged by being opposed to a target for a recording layer and the recording layer 3 is formed on the first dielectric layer 2; a third process in which the substrate 1 on which the recording layer 3 is formed is arranged by being opposed to a target for a second dielectric layer and the second dielectric layer 4 is formed on the recording layer 3 by sputtering; and a fourth process in which the substrate 1 on which the second dielectric layer 4 is formed is arranged by being opposed to a target for a reflection player and the reflection layer 5 is formed on the second dielectric layer 4 by sputtering. In the first processing, sputtering for forming the first dielectric layer 2 on the substrate 1 is performed in two steps in a process chamber of two chambers. COPYRIGHT: (C)2005,JPO&NCIPI