| 摘要 |
PROBLEM TO BE SOLVED: To provide an active vibration cancellation device or the like capable of suppressing gas discharge to a vacuum domain and suppressing deterioration of wide range vibration cancellation performance. SOLUTION: This invented active vibration cancellation device 111 bears load of a mirror cylinder base 113 of a mirror cylinder support part by pressure of pressurized gas in a bellows 20, cancellation of vibration of low frequency component is performed by drive of each VCM 40, 50, 60 in the bellows 20. Each VCM 40, 50, 60 is arranged in the bellows 20 reserving pressurized gas therein, gas generated with accompanying drive of each VCM 40, 50, 60 is blocked by the bellows 20 and does not leak into inside of an external chamber (in vacuum domain). Consequently, even if the active vibration cancellation device 111 is installed as a single body without providing a vacuum bulkhead separately, gas discharge into vacuum domain can be suppressed. Since the vacuum bulkhead is not necessary, a device construction become compact and desired device specifications can be materialized more easily. COPYRIGHT: (C)2005,JPO&NCIPI
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