| 摘要 |
PROBLEM TO BE SOLVED: To inspect whether an inspection object has a dimension determined in some degree or not by measuring the dimension of the inspection object. SOLUTION: A width calculation means 19a uses a value determined by multiplying the distance between elements of an X-ray detector 10 by the ratio between the distance Y1 from an X-ray generator 9 to the inspection object W surface and the distance Y2 from the X-ray generator 9 to the X-ray detector 10, as a unit dimension in the conveyance width direction Y to concentration data, and calculates various width dimensions in the conveyance width direction Y of the inspection object W based on the unit dimension in the conveyance width direction Y. A length calculation means 19b uses a value determined by dividing a conveyance speed by a repeating speed as a unit dimension in the conveyance direction X to the concentration data, and calculates various length dimensions in the conveyance direction X of the inspection object W based on the unit dimension in the conveyance direction X. When the external dimension of the inspection object W determined by the calculation is out of an allowable range of the external dimension set from a setting input means 15, the inspection object W is discriminated to have a defective dimension. COPYRIGHT: (C)2005,JPO&NCIPI
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