| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine processing apparatus which realizes alignment of an original board and a transfer substrate with accuracy higher than that of the conventional accuracy. SOLUTION: The fine processing apparatus for transfer, by placing in contact the original substrate and the transfer substrate, comprises a compensating drive means for conduct relative alignment between the original board and the transfer substrate, and an alignment measuring means for measuring the relative displacement between the original substrate and the transfer substrate. Displacement measured with the alignment measuring means is compensated by the compensating drive means. COPYRIGHT: (C)2005,JPO&NCIPI
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